IEEE micro electro mechanical systems.

IEEE micro electro mechanical systems.

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Bibliographic Details
Corporate Authors: IEEE Workshop on Micro Electro Mechanical Systems, IEEE Robotics and Automation Society
Format: Conference Proceeding
Language:English
Published: New York : Institut of Electrical and Electronic Engineers
Subjects:
Electromechanical devices > Congresses.
Microelectronics > Congresses.
Robotics > Congresses.
Miniature objects > Congresses.
Electromechanical devices.
Microelectronics.
Robotics.
Miniature objects.
Conference papers and proceedings.
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Technical digest
Published 1999
Conference Proceeding
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