Lithography for semiconductor manufacturing : 19-21 May, 1999, Edinburgh, Scotland /
Saved in:
| Corporate Authors: | , , , , , |
|---|---|
| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
[1999]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 3741. Europto series. |
| Subjects: |
MARC
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| 090 | |f Folio |a TK7874 |b .L51 1999 | ||
| 245 | 0 | 0 | |a Lithography for semiconductor manufacturing : |b 19-21 May, 1999, Edinburgh, Scotland / |c Chris A. Mack, Tom Stevenson, chairs/editors ; sponsored by EOS--European Optical Society, SPIE--the International Society for Optical Engineering [and] Commission of the European Communities, Directorate General for Science, Research, and Development ; cosponsored by Scottish Enterprise [and] Sira Technology Centre (UK) ; cooperating organization, IEE--the Institution of Electrical Engineers (UK). |
| 264 | 1 | |a Bellingham, Wash., USA : |b SPIE, |c [1999] | |
| 264 | 4 | |c ©1999 | |
| 300 | |a vii, 262 pages : |b illustrations ; |c 28 cm. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a unmediated |b n |2 rdamedia | ||
| 338 | |a volume |b nc |2 rdacarrier | ||
| 490 | 1 | |a Proceedings EurOpt series | |
| 490 | 1 | |a Proceedings / SPIE--the International Society for Optical Engineering ; |v v. 3741 | |
| 504 | |a Includes bibliographic references and author index. | ||
| 650 | 0 | |a Integrated circuits |x Very large scale integration |v Congresses. |0 http://id.loc.gov/authorities/subjects/sh2008104263 | |
| 650 | 0 | |a Printed circuits |v Congresses. |0 http://id.loc.gov/authorities/subjects/sh2010108243 | |
| 650 | 0 | |a Lithography |v Congresses. | |
| 650 | 7 | |a Integrated circuits |x Very large scale integration. |2 fast |0 (OCoLC)fst00975602 | |
| 650 | 7 | |a Integrated circuits. |2 fast |0 (OCoLC)fst00975535 | |
| 650 | 7 | |a Printed circuits. |2 fast |0 (OCoLC)fst01076537 | |
| 650 | 7 | |a Lithography. |2 fast |0 (OCoLC)fst01000265 | |
| 655 | 7 | |a Conference papers and proceedings. |2 fast |0 (OCoLC)fst01423772 | |
| 700 | 1 | |a Mack, Chris A. |0 http://id.loc.gov/authorities/names/n98024659 | |
| 700 | 1 | |a Stevenson, Tom. |0 http://id.loc.gov/authorities/names/n88600010 | |
| 710 | 2 | |a European Optical Society. |0 http://id.loc.gov/authorities/names/n92062713 | |
| 710 | 2 | |a Society of Photo-Optical Instrumentation Engineers. |0 http://id.loc.gov/authorities/names/n78088934 | |
| 710 | 2 | |a European Commission. |b Directorate-General XII, Science, Research, and Development. |0 http://id.loc.gov/authorities/names/no95038293 | |
| 710 | 2 | |a Scottish Enterprise. |0 http://id.loc.gov/authorities/names/nr94025873 | |
| 710 | 2 | |a Sira Technology Centre (U.K.) |0 http://id.loc.gov/authorities/names/no2001032072 | |
| 710 | 2 | |a Institution of Electrical Engineers. |0 http://id.loc.gov/authorities/names/n79063901 | |
| 830 | 0 | |a Proceedings of SPIE--the International Society for Optical Engineering ; |v v. 3741. |0 http://id.loc.gov/authorities/names/n42030541 | |
| 830 | 0 | |a Europto series. |0 http://id.loc.gov/authorities/names/n93085049 | |
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