In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May, 1999, Edinburgh, Scotland

In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May, 1999, Edinburgh, Scotland /

Saved in:
Bibliographic Details
Corporate Authors: European Optical Society, Society of Photo-Optical Instrumentation Engineers, European Commission. Directorate-General XII, Science, Research, and Development, Scottish Enterprise, Sira Technology Centre (U.K.), Institution of Electrical Engineers
Other Authors: Amberiadis, Kostas
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1999]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3743.
Europto series.
Subjects:
Integrated circuits > Very large scale integration > Design and construction > Congresses.
Semiconductors > Design and construction > Congresses.
Manufacturing processes > Congresses.
Microelectronics > Materials > Congresses.
Integrated circuits > Very large scale integration > Design and construction.
Integrated circuits.
Semiconductors > Design and construction.
Semiconductors.
Manufacturing processes.
Microelectronics > Materials.
Microelectronics.
Conference papers and proceedings.
Description
Physical Description:viii, 344 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographic references and author index.
ISBN:0819432237

Similar Items