Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films /

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Bibliographic Details
Corporate Authors: Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films Montreal, Quebec, Electrochemical Society. Dielectric Science and Technology Division, Electrochemical Society. Electronics Division
Other Authors: Deen, M. Jamal
Format: Conference Proceeding Book
Language:English
Published: Pennington, N.J. : Electrochemical Society, [1997]
Series:Proceedings (Electrochemical Society) ; v. 97-10.
Subjects:
Thin film devices > Congresses.
Silicon nitride > Congresses.
Silica > Congresses.
Electric insulators and insulation > Thin films > Congresses.
Thin film devices.
Silicon nitride.
Silica.
Electric insulators and insulation > Thin films.
Electric insulators and insulation.
Conference papers and proceedings.
Description
Physical Description:xiii, 588 pages : illustrations ; 23 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1566771374

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