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|a (OCoLC)38041915
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|a TK7872.T55
|b S54 1997
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| 111 |
2 |
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|a Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
|n (4th :
|d 1997 :
|c Montreal, Quebec)
|
| 245 |
1 |
0 |
|a Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films /
|c editors M. Jamal Deen [and others] ; Dielectric Science and Technology and Electronics Divisions [of the Electrochemical Society].
|
| 264 |
|
1 |
|a Pennington, N.J. :
|b Electrochemical Society,
|c [1997]
|
| 264 |
|
4 |
|c ©1997
|
| 300 |
|
|
|a xiii, 588 pages :
|b illustrations ;
|c 23 cm.
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
|
|a volume
|b nc
|2 rdacarrier
|
| 490 |
1 |
|
|a Proceedings / Electrochemical Society ;
|v v. 97-10
|
| 504 |
|
|
|a Includes bibliographical references and indexes.
|
| 650 |
|
0 |
|a Thin film devices
|v Congresses.
|0 http://id.loc.gov/authorities/subjects/sh2008112884
|
| 650 |
|
0 |
|a Silicon nitride
|v Congresses.
|
| 650 |
|
0 |
|a Silica
|v Congresses.
|
| 650 |
|
0 |
|a Electric insulators and insulation
|x Thin films
|v Congresses.
|
| 650 |
|
7 |
|a Thin film devices.
|2 fast
|0 (OCoLC)fst01150011
|
| 650 |
|
7 |
|a Silicon nitride.
|2 fast
|0 (OCoLC)fst01118683
|
| 650 |
|
7 |
|a Silica.
|2 fast
|0 (OCoLC)fst01118585
|
| 650 |
|
7 |
|a Electric insulators and insulation
|x Thin films.
|2 fast
|0 (OCoLC)fst00905024
|
| 650 |
|
7 |
|a Electric insulators and insulation.
|2 fast
|0 (OCoLC)fst00904970
|
| 655 |
|
7 |
|a Conference papers and proceedings.
|2 fast
|0 (OCoLC)fst01423772
|
| 700 |
1 |
|
|a Deen, M. Jamal.
|0 http://id.loc.gov/authorities/names/n98002659
|
| 710 |
2 |
|
|a Electrochemical Society. Dielectric Science and Technology Division.
|
| 710 |
2 |
|
|a Electrochemical Society.
|b Electronics Division.
|0 http://id.loc.gov/authorities/names/n79124670
|
| 740 |
0 |
|
|a Silicon Nitride and Silicon Dioxide Thin Insulating Films.
|
| 830 |
|
0 |
|a Proceedings (Electrochemical Society) ;
|v v. 97-10.
|0 http://id.loc.gov/authorities/names/n42019782
|
| 907 |
|
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|p Circulating
|a Santa Clara University
|b Santa Clara Main Campus
|c University Library
|d University Library Main Stacks, Lower Level
|t 0
|e TK7872.T55 S54 1997
|h Library of Congress classification
|i book
|m 35098106351805
|n c.1
|