Microlithography : process technology for IC fabrication

Microlithography : process technology for IC fabrication /

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Bibliographic Details
Main Author: Elliott, David J.
Format: Book
Language:English
Published: New York : McGraw-Hill, [1986]
Subjects:
Integrated circuits > Very large scale integration > Design and construction.
Microlithography.
Photoresists.
Integrated circuits.

University Library Main Stacks, Lower Level

Holdings details from University Library Main Stacks, Lower Level
Call Number: TK7874 .E495 1986
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