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b1113570 |
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20240627092812.0 |
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850806t19861986nyua b 001 0 eng |
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|a 85018196
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|a 0070193045 :
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| 035 |
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|a (OCoLC)12418734
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|a DLC
|c DLC
|d m/c
|d STA
|d UtOrBLW
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| 049 |
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|a STAM
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| 090 |
|
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|a TK7874
|b .E495 1986
|
| 100 |
1 |
|
|a Elliott, David J.
|0 http://id.loc.gov/authorities/names/n81076710
|
| 245 |
1 |
0 |
|a Microlithography :
|b process technology for IC fabrication /
|c David J. Elliott.
|
| 264 |
|
1 |
|a New York :
|b McGraw-Hill,
|c [1986]
|
| 264 |
|
4 |
|c ©1986
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| 300 |
|
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|a xix, 378 pages :
|b illustrations ;
|c 24 cm
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
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|a volume
|b nc
|2 rdacarrier
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| 504 |
|
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|a Includes bibliographies and index
|
| 650 |
|
0 |
|a Integrated circuits
|x Very large scale integration
|x Design and construction.
|0 http://id.loc.gov/authorities/subjects/sh2008104742
|
| 650 |
|
0 |
|a Microlithography.
|0 http://id.loc.gov/authorities/subjects/sh85084858
|
| 650 |
|
0 |
|a Photoresists.
|0 http://id.loc.gov/authorities/subjects/sh85101409
|
| 650 |
|
7 |
|a Integrated circuits
|x Very large scale integration
|x Design and construction.
|2 fast
|0 (OCoLC)fst00975610
|
| 650 |
|
7 |
|a Integrated circuits.
|2 fast
|0 (OCoLC)fst00975535
|
| 650 |
|
7 |
|a Microlithography.
|2 fast
|0 (OCoLC)fst01019883
|
| 650 |
|
7 |
|a Photoresists.
|2 fast
|0 (OCoLC)fst01062099
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| 907 |
|
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|a .b11135700
|b 240629
|c 920111
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| 918 |
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|a .bckstg
|b 2016-12-01
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| 998 |
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|a umn
|b 920111
|c m
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|e -
|f eng
|g nyu
|h 0
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| 952 |
f |
f |
|p Circulating
|a Santa Clara University
|b Santa Clara Main Campus
|c University Library
|d University Library Main Stacks, Lower Level
|t 0
|e TK7874 .E495 1986
|h Library of Congress classification
|i book
|m 35098202975499
|n c.1
|