IEEE/SEMI International Semiconductor Manufacturing Science Symposium.

IEEE/SEMI International Semiconductor Manufacturing Science Symposium.

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Bibliographic Details
New Title:International Symposium on Semiconductor Manufacturing. Proceedings
Corporate Authors: IEEE/SEMI International Semiconductor Manufacturing Science Symposium, Semiconductor Equipment and Materials International, IEEE Electron Devices Society, IEEE Components, Hybrids, and Manufacturing Technology Society
Format: Conference Proceeding
Language:English
Published: New York, NY : IEEE, 1989-
Subjects:
Semiconductor industry > Congresses.
Semiconductor industrial equipment industry > Congresses.
Semiconductor production equipment > Congresses.
Semiconductors > Design and construction > Congresses.
Semiconductor industry.
Semiconductor industrial equipment industry.
Semiconductor production equipment.
Semiconductors > Design and construction.
Semiconductors.
Conference papers and proceedings.

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Call Number: Folio TK7836 .I43
Copy 1 (1990) Available Request this item
Copy 2 (1991) Available Request this item
Copy 3 (1992) Available Request this item
Copy 4 (1993) Available Request this item

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