Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A. /
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| Other Authors: | , , |
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| Format: | Book |
| Language: | English |
| Published: |
Pittsburgh, Pa. :
Materials Research Society,
[1986]
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| Series: | Materials Research Society symposia proceedings ;
v. 71. |
| Subjects: |
University Library ARS Main Stacks
| Call Number: |
TK7874 .M344 1986
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| Copy 1 | Available Request this item |