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860721t19861986paua b 101 0 eng |
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|a 86018108
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|a 0931837375 :
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|a (OCoLC)14002798
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|a STAM
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|a TK7874
|b .M344 1986
|
| 245 |
0 |
0 |
|a Materials issues in silicon integrated circuit processing :
|b symposium held April 15-18, 1986, Palo Alto, California, U.S.A. /
|c editors, Marc Wittmer, James Stimmell, Michael Strathman.
|
| 264 |
|
1 |
|a Pittsburgh, Pa. :
|b Materials Research Society,
|c [1986]
|
| 264 |
|
4 |
|c ©1986
|
| 300 |
|
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|a xvii, 535 pages :
|b illustrations ;
|c 24 cm.
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
|
| 337 |
|
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|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
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|a volume
|b nc
|2 rdacarrier
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| 490 |
1 |
|
|a Materials Research Society symposia proceedings,
|x 0272-9172 ;
|v v. 71
|
| 504 |
|
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|a Includes bibliographies and indexes.
|
| 583 |
1 |
|
|a Committed to retain
|c 20220701
|d 20320731
|f SCELC Shared Print
|u https://scelc.org/libraries/shared-print
|z retain for SCELC
|
| 650 |
|
0 |
|a Microelectronics
|x Materials
|v Congresses.
|0 http://id.loc.gov/authorities/subjects/sh2008107190
|
| 650 |
|
7 |
|a Microelectronics
|x Materials.
|2 fast
|0 (OCoLC)fst01019771
|
| 650 |
|
7 |
|a Microelectronics.
|2 fast
|0 (OCoLC)fst01019757
|
| 655 |
|
7 |
|a Conference papers and proceedings.
|2 fast
|0 (OCoLC)fst01423772
|
| 700 |
1 |
|
|a Wittmer, Marc.
|0 http://id.loc.gov/authorities/names/n2016007365
|
| 700 |
1 |
|
|a Stimmell, James.
|0 http://id.loc.gov/authorities/names/n86088757
|
| 700 |
1 |
|
|a Strathman, Michael.
|0 http://id.loc.gov/authorities/names/n86088758
|
| 830 |
|
0 |
|a Materials Research Society symposia proceedings ;
|v v. 71.
|0 http://id.loc.gov/authorities/names/n42037756
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|a Santa Clara University
|b Santa Clara Main Campus
|c University Library
|d University Library ARS Main Stacks
|t 0
|e TK7874 .M344 1986
|h Library of Congress classification
|i book
|m 35098104160489
|n c.1
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